PID	lot	CovParm	Estimate	Alpha	Lower	Upper
1	1	calibration	0.02171	0.05	-0.04301	0.08642
1	1	calibration*day	0.05197	0.05	-0.01889	0.1228
1	1	calibration*day*run	0.03239	0.05	-0.01132	0.07609
1	1	Residual	0.07079	0.05	0.04813	0.1144
1	2	calibration	0.03611	0.05	-0.02491	0.09712
1	2	calibration*day	0.02153	0.05	-0.02664	0.06970
1	2	calibration*day*run	0.03128	0.05	-0.01137	0.07393
1	2	Residual	0.06959	0.05	0.04731	0.1124
1	3	calibration	0.05148	0.05	-0.02387	0.1268
1	3	calibration*day	0.03486	0.05	-0.00794	0.07767
1	3	calibration*day*run	0.01202	0.05	-0.01059	0.03462
1	3	Residual	0.04395	0.05	0.02988	0.07100
2	1	calibration	0.1503	0.05	-0.07664	0.3773
2	1	calibration*day	0.02115	0.05	-0.1127	0.1550
2	1	calibration*day*run	0.1428	0.05	-0.00867	0.2942
2	1	Residual	0.1957	0.05	0.1330	0.3161
2	2	calibration	0.1003	0.05	-0.08680	0.2874
2	2	calibration*day	0.03674	0.05	-0.1373	0.2108
2	2	calibration*day*run	0.1870	0.05	0.000279	0.3736
2	2	Residual	0.2229	0.05	0.1515	0.3601
2	3	calibration	0.2357	0.05	-0.04741	0.5188
2	3	calibration*day	0.05779	0.05	-0.05670	0.1723
2	3	calibration*day*run	0.06003	0.05	-0.03727	0.1573
2	3	Residual	0.1764	0.05	0.1200	0.2850
3	1	calibration	0.3131	0.05	-0.1849	0.8110
3	1	calibration*day	-0.01593	0.05	-0.3635	0.3316
3	1	calibration*day*run	0.3955	0.05	-0.06009	0.8511
3	1	Residual	0.6448	0.05	0.4384	1.0416
3	2	calibration	0.2211	0.05	-0.1246	0.5667
3	2	calibration*day	0.02099	0.05	-0.2612	0.3032
3	2	calibration*day*run	0.3582	0.05	0.02678	0.6896
3	2	Residual	0.3510	0.05	0.2386	0.5670
3	3	calibration	0.3065	0.05	-0.1808	0.7938
3	3	calibration*day	0.1147	0.05	-0.2134	0.4429
3	3	calibration*day*run	0.3484	0.05	0.03849	0.6584
3	3	Residual	0.3050	0.05	0.2074	0.4927
4	1	calibration	0.4212	0.05	-0.4060	1.2483
4	1	calibration*day	0.01376	0.05	-0.7934	0.8209
4	1	calibration*day*run	1.0692	0.05	0.07368	2.0647
4	1	Residual	1.0659	0.05	0.7247	1.7219
4	2	calibration	0.07925	0.05	-0.5758	0.7343
4	2	calibration*day	0.2838	0.05	-0.5052	1.0727
4	2	calibration*day*run	0.6039	0.05	-0.1478	1.3557
4	2	Residual	1.1426	0.05	0.7768	1.8458
4	3	calibration	0.7291	0.05	-0.4392	1.8973
4	3	calibration*day	0.3108	0.05	-0.4737	1.0953
4	3	calibration*day*run	0.7300	0.05	0.01863	1.4414
4	3	Residual	0.8197	0.05	0.5573	1.3241
5	1	calibration	0.09083	0.05	-0.7273	0.9090
5	1	calibration*day	0.4181	0.05	-0.4991	1.3352
5	1	calibration*day*run	0.7673	0.05	-0.06598	1.6005
5	1	Residual	1.1065	0.05	0.7522	1.7874
5	2	calibration	0.2386	0.05	-0.6590	1.1362
5	2	calibration*day	0.4864	0.05	-0.5612	1.5341
5	2	calibration*day*run	1.0048	0.05	0.1087	1.9009
5	2	Residual	0.8864	0.05	0.6026	1.4319
5	3	calibration	0.2752	0.05	-0.6407	1.1910
5	3	calibration*day	0.4543	0.05	-0.3788	1.2873
5	3	calibration*day*run	0.5013	0.05	-0.1637	1.1662
5	3	Residual	1.0635	0.05	0.7230	1.7181
6	1	calibration	0.9992	0.05	-0.5603	2.5587
6	1	calibration*day	0.3476	0.05	-0.5969	1.2922
6	1	calibration*day*run	1.1958	0.05	0.3276	2.0641
6	1	Residual	0.4608	0.05	0.3133	0.7443
6	2	calibration	0.9155	0.05	-0.5044	2.3354
6	2	calibration*day	0.2936	0.05	-0.7225	1.3097
6	2	calibration*day*run	1.2423	0.05	0.2403	2.2444
6	2	Residual	0.7823	0.05	0.5318	1.2637
6	3	calibration	0.8810	0.05	-1.0364	2.7984
6	3	calibration*day	0.9213	0.05	-0.3555	2.1980
6	3	calibration*day*run	0.8344	0.05	0.09854	1.5703
6	3	Residual	0.7117	0.05	0.4839	1.1497
7	1	calibration	1.5009	0.05	-0.8389	3.8407
7	1	calibration*day	0.006792	0.05	-1.6622	1.6758
7	1	calibration*day*run	2.3008	0.05	0.2364	4.3652
7	1	Residual	2.0662	0.05	1.4047	3.3379
7	2	calibration	0.8052	0.05	-0.7918	2.4021
7	2	calibration*day	0.5849	0.05	-1.0414	2.2111
7	2	calibration*day*run	1.6569	0.05	0.1488	3.1651
7	2	Residual	1.5509	0.05	1.0544	2.5054
7	3	calibration	2.1316	0.05	-0.8273	5.0905
7	3	calibration*day	0.4630	0.05	-1.1579	2.0838
7	3	calibration*day*run	1.4350	0.05	-0.2287	3.0987
7	3	Residual	2.3694	0.05	1.6109	3.8278
8	1	calibration	1.9346	0.05	-1.5798	5.4490
8	1	calibration*day	0.3885	0.05	-2.6613	3.4383
8	1	calibration*day*run	5.0131	0.05	1.6051	8.4211
8	1	Residual	1.2101	0.05	0.8227	1.9549
8	2	calibration	2.0266	0.05	-1.2721	5.3254
8	2	calibration*day	0.6954	0.05	-2.0188	3.4096
8	2	calibration*day*run	3.6721	0.05	0.9479	6.3962
8	2	Residual	1.5927	0.05	1.0828	2.5730
8	3	calibration	1.5794	0.05	-1.5505	4.7093
8	3	calibration*day	0.6181	0.05	-1.9154	3.1517
8	3	calibration*day*run	3.5686	0.05	0.9871	6.1500
8	3	Residual	1.3453	0.05	0.9147	2.1734
9	1	calibration	7.3087	0.05	-2.9871	17.6046
9	1	calibration*day	2.0152	0.05	-3.8699	7.9002
9	1	calibration*day*run	5.6589	0.05	0.03315	11.2847
9	1	Residual	6.6751	0.05	4.5382	10.7834
9	2	calibration	5.8078	0.05	-3.1637	14.7794
9	2	calibration*day	2.6964	0.05	-3.5876	8.9805
9	2	calibration*day*run	6.9183	0.05	1.5319	12.3048
9	2	Residual	3.7730	0.05	2.5651	6.0951
9	3	calibration	1.2744	0.05	-5.3589	7.9076
9	3	calibration*day	5.5641	0.05	-2.4243	13.5525
9	3	calibration*day*run	5.6130	0.05	0.5433	10.6826
9	3	Residual	5.1386	0.05	3.4935	8.3012
